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creating a physical link between the workpiece and the two transporting apparatuses; PA1 moving the workpiece to the required position; PA1 stopping the first transporting apparatus; PA1 transporting the workpiece by the second transporting apparatus to the required position. PA1 injecting a process gas into the deposition cell; PA1 separating from the carrier gas a flowing current of gas that is enriched in said process gas; PA1 conducting the flowing current of gas over the workpiece that is deposited on the carrier gas.
The process that is disclosed in EP-A1-0 272 897 is disadvantageous because it is very complicated. The main disadvantage consists of the fact that the physical link between the workpiece and the transporting apparatuses has to be created manually. Manual intervention can lead to significant errors. This is because the link between the workpiece and the transporting apparatuses has to be created manually, in a first operation step, by inserting an alligator clip into the receiving openings of the second transporting apparatus and of the workpiece. It is also necessary to correctly position the alligator clip in the receiving openings and to hold it in this position for a short period of time, for example by screw ac619d1d87
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